Excimer 準分子雷射系統
準分子雷射系統
Excimer Laser System
Promaster 準分子系統: 可精密控制雷射能量於1%
1. 標準的汎用光罩夾置具可微調X,Y , 光罩尺寸可達25mmx75mm
2. 放大控置倍率: 4-11.5X
3. TTL 數位顯示倍率達450X
4. X-Y 精密定位平台工作範圍: 200 x 200mm, 含真空吸附功能, 解析度1um , 速度由搖桿控制可達0-50mm/s		 Promaster Configuration : with 1% precision energy control
1. Standard Universal mask holder with X,Y adjustment, mask up to 25mmx75mm
2. Demagnification control from 4-11.5X
3. TTL camera display up to 450X
4. 200x200mm precision X-Y tables
with vacuum chuck, 1um resolution ,
0-50mm/s speed control by joystick
Micro Master V5 高效能準分子雷射系統:
1. 完全整合系統具安全連控功能
2. 符合雷射Class 1及CE 安規標準
3. 能量密度範圍0.25 -5J/cm2
4. 光罩處理範圍2mm2 at 0.25J/cm2; to 150umx150um at 20J/cm2
5. 光學解析度: 1.5um
6. 穿透與垂直面小於10度,實際上應無斜角錐		 Micro Master V5 High performance System :
1. Fully integrated system with Interlocked safety cover
2. Meet Class 1 laser system & CE
certified
3. Energy Density in the range 0.25 -5J/
cm2
4. mask defined process area is 2mm2 at 0.25J/cm2; to 150umx150um at 20J/cm2
5. optical resolution : 1.5um
6. wall angle between 10 degree and
practically zero taper.

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鼎信光電科技股份有限公司
114 台北市內湖區瑞光路221號2樓　 TEL：(02) 2658-7208　FAX：(02) 2658-7209