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NPS-XY-100A 二軸壓電平台
1. X-Y位移範圍可達100um
2. 位移採用電容式回饋感測器,解析可小於1nm
3. 線性誤差需小於 0.02%
4. 系統位移偏差小於25微徑度(urad)
5. 40mm圓穿透區域以利供穿透式信號量測用
6. 採用Supar Invar 材質,熱變型量小
7. 最大負載量1Kg.
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Nano Mechanisms-NPS-XY-100A:
1. 100umx100umm Travel Range
2. Capacitive sensor to reach sub-nanometer reach sub-nanometer reproducibility
3. Linearity error less than 0.02%
4.Parastic motions less than 25micron -radians
5. Super-Invar construction option ,minimizes thermal drift
6. 40mm clear aperture
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NPS3000 系列壓電控制器
1. 21bit 解析能力,7數位浮點運算指令, (100um範圍可相當達 0.05nm.)
2. 線性誤差需小於 0.02%
3. 提供閉迴路 PID 控制.
供capacitive sensor 感測器可達sub nm解析
4. 提供控制軟體,可直接調整PID及系統參數
5. 平台參數及特性可存於EPROM
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NPS3000 series Digital Controller
1. 21 bit effective resolution,7 digit floating point command 0.05nm resolution
at 100um travel range
2. Better than 0.02% linearity error
3. Optimized PID loop parameters adjustable ,
3. Data Sheet stored in EPROM, easy change configuration
3. Front panel software, and DLL command language.
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SPNS 1100-單一量測頭奈米感測器
1. 低成本,小尺寸及高效能
2. 奈米極解析,可出貨前調參數
3. 量測範圍可達 240um,輸出+/- 10V 電壓
4. 適合導電材料,隱藏式及OEM之應用
5. 可作位移的振動及重複性量測等應用
6. 量厚度,直線度及主軸振動等應用
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SPNS 1100-Sing probe Nanosensor
1. low cost package, small size, high performance
2. Nanometer resolution, pre-calibrated
2. Measuring range : 240um, with+/- 10V output
3. Ideal for embedded, OEM for conductive target application
4. Repeatability & vibration application
5. Repeatability & vibration application
6. Thickness, spindle run out, straightness measurement .
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